Bonding Method for Thin Film Diamond Providing Low Vapor Pressure at High Temperature

摘要

A thin diamond film bonded to a diamond substrate made by the process of heating a diamond substrate inside a vacuum chamber to about 500° C., cooling the diamond substrate, coating a first surface of the diamond substrate with chromium, depositing an initial layer of palladium, heating the diamond substrate, allowing the chromium and the diamond substrate to form a chemical bond, inter-diffusing the adhesion layer of chromium and the initial layer of palladium, cooling, depositing palladium, placing a shadow mask, degassing the vacuum, depositing a tin layer, assembling the tin layer, heating the tin layer, melting the tin layer, and bonding the thin diamond film to the diamond substrate. A thin diamond film bonded to a diamond substrate comprising a thin diamond film, a layer of chromium, palladium, tin, and a diamond substrate.

主权项

1. A thin diamond film bonded to a diamond substrate made by the process of:
heating a diamond substrate inside a vacuum chamber to about 500° C.; cooling the diamond substrate to a temperature of about 200° C.; coating a first surface of the diamond substrate with an adhesion layer of chromium; depositing an initial layer of palladium on the adhesion layer of chromium; heating the diamond substrate to a temperature of about 600° C.; allowing the chromium and the diamond substrate to form a chemical bond; inter-diffusing the adhesion layer of chromium and the initial layer of palladium; cooling the diamond substrate to about 200° C.; depositing a second layer of palladium; placing a shadow mask on a thin diamond film; degassing the vacuum at about 200° C. and minimizing sublimation of the deposited chromium; depositing a tin layer onto the thin diamond film; assembling the tin layer on the thin diamond film with the second palladium layer; heating the tin layer on the thin diamond film and the second palladium layer; melting the tin layer; and bonding the thin diamond film to the diamond substrate.