发明名称 Method of determining a characteristic
摘要 A first target population and a second target population are etched into a substrate. The second target population has an asymmetry with respect to the first target population. This can allow the different target populations to be distinguished and characteristics of the different target populations determined.
申请公布号 IL213064(A) 申请公布日期 2016.03.31
申请号 IL20110213064 申请日期 2011.05.23
申请人 ASML NETHERLANDS B.V. 发明人
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