| 摘要 |
PROBLEM TO BE SOLVED: To enable a failure occurrence of thermal processing to easily be detected even when a fluctuation in applied pressure occurs on a workpiece of a heater chip upon a heating start by a fluctuation in the fall speed of an elevation head without using an expensive and complicate height measurement part such as a rotary encoder.SOLUTION: A method is adopted to a thermal processor which makes an elevation/lowering head 28 capable of elevating/lowering and fixing a position with respect to a base 22 hold a downwardly spring-energized heater chip 32 to be capable of moving up and down, presses the heater chip 32 against a work piece 48, and generates heat to thermally process the work piece 48 by making an elevation/lowering head 28 lower from a reference position. The elevation/lowering head 28 is controlled to elevate/lower by a motor 28 and stops the drive of the motor 28 when a pressing force of a spring 36 on the work piece 48 reaches a set pressure, makes the heater chip 32 generate heat, and determines quality of thermal processing by a lowering amount of the heater chip 32 accompanying the thermal processing of the work piece 48.SELECTED DRAWING: Figure 4 |
