POSITION DETECTION APPARATUS, SUBSTRATE PROCESSING APPARATUS, POSITION DETECTION METHOD AND SUBSTRATE PROCESSING METHOD

摘要

A position detection apparatus detects the positions of movable parts 33, 43, 53 which are movable within processing space SP inside a chamber 90. An imaging device 72 shoots reference sections 61-64, which are disposed inside the chamber 90 and the positions of which are known, and the movable parts and accordingly obtains an original image. An image processor 86 executes image processing which is for detecting the movable parts and the reference sections from the original image. An image detector 86 detects the positions of the movable parts within the processing space in accordance with position information which is indicative of the positions of the movable parts and the reference sections within the original image. It is possible to accurately detect the positions of the movable parts while suppressing the influence exerted by deviation of the imaging device.

主权项

1. A position detection apparatus which detects a position of a movable part which is so disposed to move within processing space inside a chamber, comprising:
an imaging device which shoots a reference section and the movable part, thereby obtaining an original image, the reference section being disposed inside the chamber and a position of which inside the chamber being known; an image processor which performs image processing of the original image, thereby detecting the movable part and the reference section within the original image; and a position detector which detects the position of the movable part within the processing space based upon position information which is indicative of positions of the movable part and the reference section detected within the original image.