| 摘要 |
Provided is a liquid supply system which can achieve a steady pumping operation even when a liquid containing a slurry and having an extremely low temperature is used as a liquid to be supplied. A liquid supply system for supplying a liquid containing a slurry component and having an extremely low temperature by the action of the extension and contract of bellows 41 and 42, said liquid supply system being characterized in that a region in the bellows 41 and 42 with which at least the liquid comes in contact is coated with a resin having a low-temperature brittleness temperature equal to or lower than a temperature at which the liquid supply system is to be used. |
