| 摘要 |
A CUTTING AND GRINDING APPARATUS FOR CUTTING A RECTANGULAR SUBSTRATE ALONG A PLURALITY OF PARALLEL DIVISION LINES FORMED ON THE RECTANGULAR SUBSTRATE AND GRINDING A CUT SURFACE OF THE RECTANGULAR SUBSTRATE.THE CUTTING AND GRINDING APPARATUS INCLUDES A HOLDING TABLE MECHANISM AND A PROCESSING UNIT INCLUDING A COMBINED TOOL HAVING A CUTTING BLADE FOR CUTTING THE RECTANGULAR SUBSTRATE HELD BY THE HOLDING TABLE MECHANISM ALONG EACH DIVISION LINE AND A GRINDING WHEEL FOR GRINDING THE CUT SURFACE. THE HOLDING TABLE MECHANISM INCLUDES A SUPPORTING BASE AND A HOLDING TABLE HAVING A HOLDING SURFACE FOR HOLDING THE RECTANGULAR SUBSTRATE.THE HOLDING TABLE IS PROVIDED WITH AN INDEX JIG ADAPTED TO BE PLACED ON THE HOLDING SURFACE IN THE CONDITION WHERE THE INDEX JIG IS JOINED THROUGH A WAX TO ONE END SURFACE OF THE RECTANGULAR SUBSTRATE, A JIG INDEXING UNIT, A SUCTION HOLDING UNIT FOR HOLDING UNDER SUCTION THE RECTANGULAR SUBSTRATE JOINED TO THE INDEX JIG PUSHED BY THE JIG INDEXING UNIT, AND A PRESSING UNIT FOR PRESSING THE INDEX JIG AGAINST THE HOLDING SURFACE TO SUPPRESS THE MOVEMENT OF THE INDEX JIG. |
