| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprint device useful in evaluating the state of peeling between a mold and an imprint material during a period of time when peeling the mold from the hardened imprint material on a substrate.SOLUTION: The imprint device which performs an imprint process for forming a pattern on an imprint material on a substrate ST with a mold 104 comprises: a hardening part for hardening the imprint material; a moving part for relatively moving the mold 104 and the substrate ST; a detector for detecting an interference pattern of light reflected by the mold 104, and light reflected by the substrate; and a processing part which determines information concerning the state of peeling between the mold 104 and the imprint material on the basis of the interference pattern detected by the detector while the mold 104 is peeled from the hardened imprint material on the substrate by widening, by the moving part, a distance between the mold 104 and the substrate ST.SELECTED DRAWING: Figure 6 |
