发明名称 PLASTIC-MOLDED SEMICONDUCTOR INTEGRATED CIRCUIT PACKAGE UNSEALING METHOD AND UNSEALING DEVICE
摘要 [Problem] To provide a plastic mold unsealing method and unsealing device for unsealing a semiconductor device molded by use of plastic. [Solution] Provided are a plastic mold unsealing method and unsealing device for unsealing a semiconductor device molded by use of plastic, wherein the molded semiconductor device is unsealed by use of a chemical solution prepared by dissolving a metal into a liquid containing an acid. This can prevent metals, such as bonding wires, which are used on a packaged board, from being damaged by a chemical solution used in unsealing the packaged board.
申请公布号 WO2016046995(A1) 申请公布日期 2016.03.31
申请号 WO2014JP77420 申请日期 2014.10.15
申请人 NIPPON SCIENTIFIC CO., LTD. 发明人 SUZUKI SATOSHI
分类号 H01L21/56;H01L23/00 主分类号 H01L21/56
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