| 摘要 |
PROBLEM TO BE SOLVED: To provide a physical quantity sensor capable of reducing deviation in electrostatic capacitance, and also to provide a physical quantity sensor device, an electronic apparatus, and a moving body.SOLUTION: A physical quantity sensor 1 includes a support part 41, and a movable part 42 which is connected to the support part 41 via connection parts 43 and 44. The movable part 42 includes: a swing element 4 having a first movable part 421 and a second movable part 422; a first fixing electrode 51 arranged opposite to the first movable part 421; a second fixing electrode 52 arranged opposite to the second movable part 422; and a dummy electrode 53 which is opposite to the second movable part 422, arranged so as not to be overlapped on the second fixing electrode 52, and has the same potential with the swing element 4. The first fixing electrode 51 is arranged so that a part thereof is overlapped on the support part 41 in a plan view.SELECTED DRAWING: Figure 1 |
