| 发明名称 |
COMPOSITE CHARGED PARTICLE BEAM APPARATUS |
| 摘要 |
A composite charged particle beam apparatus includes a first charged particle beam column that irradiates a thin sample with a first charged particle beam, a second charged particle beam column that irradiates an irradiation position of the first the charged particle beam of the thin sample with a second charged particle beam, and a sample holder that fixes the thin sample, and a sample stage on which the sample holder is mounted. The sample holder is able to rotate the thin sample within a surface parallel to an observation surface of the thin sample around a first rotational axis on the sample stage. |
| 申请公布号 |
US2016093464(A1) |
申请公布日期 |
2016.03.31 |
| 申请号 |
US201514868526 |
申请日期 |
2015.09.29 |
| 申请人 |
HITACHI HIGH-TECH SCIENCE CORPORATION |
发明人 |
SUZUKI Hiroyuki;KITAYAMA Shinya |
| 分类号 |
H01J37/20;H01J37/285 |
主分类号 |
H01J37/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A composite charged particle beam apparatus comprising:
a first charged particle beam column configured to irradiate a thin sample with a first charged particle beam; a second charged particle beam column configured to irradiate an irradiation position of the first charged particle beam of the thin sample with a second charged particle beam; a sample holder configured to hold the thin sample; and a sample stage, on which the sample holder is mounted, wherein the sample holder is configured to rotate the thin sample within a surface parallel to an observation surface of the thin sample around a first rotational axis on the sample stage. |
| 地址 |
Tokyo JP |
