| 发明名称 |
METHOD FOR COATING A SUBSTRATE AND COATING DEVICE |
| 摘要 |
A method for coating a substrate with a lacquer includes spraying lacquer onto the substrate and subsequently spraying the applied lacquer with solvent. In some embodiments, before the solvent is sprayed the lacquer is heated. Also disclosed is a corresponding coating device for lacquering substrates. |
| 申请公布号 |
US2016089691(A1) |
申请公布日期 |
2016.03.31 |
| 申请号 |
US201514861117 |
申请日期 |
2015.09.22 |
| 申请人 |
SUSS MicroTec Lithography GmbH |
发明人 |
Fischer Katrin;Palitschka Florian;Platen Johannes;Kaneko Kento |
| 分类号 |
B05D1/02;B05B1/12 |
主分类号 |
B05D1/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for coating a substrate with a lacquer, comprising the steps of:
spraying the lacquer onto the substrate; and subsequently spraying the lacquer applied to the substrate with a solvent. |
| 地址 |
Garching DE |
