发明名称 GANTRY DEVICE AND CONTROL METHOD
摘要 A gantry device and control method; the gantry device comprises a support device, a gantry frame body (8) provided on the support device via a gantry frame connecting device, a sensing unit (2, 5) and a scanning galvanometer (4) arranged on the gantry frame body (8), a sensing unit (3) arranged on the support device, and a vertical actuator (6) located between the scanning galvanometer (4) and the gantry frame body (8) and used to support the scanning galvanometer (4) to move vertically; the gantry frame body (8) cooperates with the gantry frame connecting device to realize the horizontal movement and vertical movement of the gantry frame body (8); according to measurement values of the sensing units (2, 3, 5), a vertical setting value of the sensing unit (5) for measuring the height of the scanning galvanometer (4) is acquired, and then the scanning galvanometer (4) is moved so as to adjust the optimal focal point of the scanning galvanometer (4) to a target point.
申请公布号 WO2016045461(A1) 申请公布日期 2016.03.31
申请号 WO2015CN86912 申请日期 2015.08.14
申请人 SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD. 发明人 HAN, CHUNYAN
分类号 G03F7/20 主分类号 G03F7/20
代理机构 代理人
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