Mid-Infrared Scanning System

摘要

An apparatus and method for generating a mid-infrared region image of a specimen are disclosed. The apparatus includes a mid-infrared region laser that generates a first light beam, and a stage adapted to carry a specimen to be scanned. An optical assembly focuses the first light beam to a point on the specimen. A first light detector measures a first intensity of light leaving the point on the specimen. A stage actuator assembly causes the specimen to move relative to the point in two dimensions. A controller forms a mid-infrared region image from the first intensity. The image can be based on reflected or transmitted light. The maximum size of the imaged area is determined by a scanning assembly that moves in a first direction relative to the stage, the stage moving in a direction orthogonal to the first direction.

主权项

1. An apparatus comprising a MIR imaging system comprising:
a MIR laser that generates a first light beam; a stage adapted to carry a specimen to be scanned; an optical assembly that focuses said first light beam to a point on said specimen; a first light detector that measures a first intensity of light leaving said point on said specimen; a stage actuator assembly that causes said specimen to move relative to said point in two dimensions; and a controller that forms a MIR image from said first intensity, wherein said optical assembly comprises a scanning assembly having a focusing lens that focuses said first light beam to said point and a mirror that moves in a first direction relative to said stage such that said focusing lens maintains a fixed distance between said focusing lens and said stage, said stage moving in a direction orthogonal to said first direction.