| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaluation method for quantitatively acquiring the local distribution of electric resistance in an object to be measured with high reproducibility and making easy and accurately local electrical evaluation possible.SOLUTION: The present invention is an evaluation method for generating an absorption current while not in contact with a sample, the evaluation method executing: a step 11 for acquiring the two-dimensional distribution of calorific capacity of a sample; a step 12 for acquiring the two-dimensional distribution of absorption current values of the sample at a plurality of different temperatures; a step 14 for measuring the transient response of a temperature change at each coordinate of the sample; a step 15 for calculating a heat resistance value at each coordinate of the sample and acquiring the two-dimensional distribution of heat resistance values of the sample; and a step 17 for calculating an electric resistance value at each coordinate using the calculated heat resistance value at each coordinate and acquiring the two-dimensional distribution of electric resistance values of the sample.SELECTED DRAWING: Figure 2 |
