| 摘要 |
Provided are a single-chip differential free layer push-pull magnetic field sensor bridge and preparation method, the magnetic field sensor bridge comprising: a substrate (4), a staggered soft magnetic flux concentrator array (11, 12), and a GMR spin valve or a TMR magnetoresistance sensing unit array (35, 36) having a magnetic sensitivity in an X-direction on the substrate (4). A soft magnetic flux concentrator (1) comprises sides parallel to an X-axis and a Y-axis, and four corners sequentially labelled as A, B, C and D clockwise from an upper left position. Magnetoresistance sensing units (31, 32, 33, 34) are located at gaps between the soft magnetic flux concentrators (1), and magnetoresistance sensing units (3) corresponding to the A and C corner positions and B and D corner positions of the soft magnetic flux concentrator (1) are defined as push magnetoresistance sensing units (31, 33) and pull magnetoresistance sensing units (32, 34) respectively. The push magnetoresistance sensing units (31, 33) are electrically connected to one or more push arms, and the pull magnetoresistance sensing units (32, 34) are electrically connected to one or more pull arms, such that the push and pull arms are electrically connected to form a push-pull sensor bridge. The present invention has a low power consumption, a high magnetic field sensitivity, and can measure a magnetic field in a Y-direction. |
