圧電体薄膜付き基板の製造方法、及び圧電体薄膜素子の製造方法,申请号JP20120201829-传众专利搜索

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发明名称	圧電体薄膜付き基板の製造方法、及び圧電体薄膜素子の製造方法
摘要
申请公布号	JP5897436(B2)	申请公布日期	2016.03.30
申请号	JP20120201829	申请日期	2012.09.13
申请人	住友化学株式会社	发明人	堀切文正;柴田憲治;末永和史;渡辺和俊;野本明;野口将希
分类号	H01L41/332;H01L41/09;H01L41/187	主分类号	H01L41/332
代理机构		代理人
主权项
地址

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