| 摘要 |
A probe microscope head 10 of a scanning probe microscope includes a scanning mechanism 11 to scan a cantilever chip 1 along the X-, Y-, and Z-axes perpendicular to each other, and an optical transmission plate 20 arranged in contact with liquid. The optical transmission plate 20, which transmits detection light for detecting the displacement of the cantilever of the cantilever chip 1, is not scanned by the scanning mechanism 11. |
