| 摘要 |
The present invention is a coating solution for diffusing phosphorous, characterized by comprising (a) a phosphorous compound, (b) a polyvinyl ester resin having an average polymerization degree of 150-4000, (c) an alkoxysilane, and (d) an organic solvent having a boiling point of 70ºC or higher. The coating solution has excellent coatability, can diffuse phosphorous without causing fluctuations in a resistance value at a center part and a resistance value at a peripheral part in a semiconductor device in which phosphorous is diffused, and can be stored at ambient temperature. |
