| 摘要 |
The invention provides a detector and a chip transport unit, compared to the prior art, source is saved, manufacture costs are reduced. The detector comprises the components as follows: a detection portion, which enables a probe to be contacted to the semiconductor device of the semiconductor chip arranged on a load table for electric detection; a loading portion, which loads a semiconductor chip accommodation container; a chip transport mechanism, which has an upper and lower drive mechanism, a rotary drive mechanism and a horizontal drive mechanism, wherein the semiconductor chip can be transported between the semiconductor chip accommodation container and the loading table; and a cover opening and closing mechanism, which enables the cover of the semiconductor chip accommodation container to be open and closed through the up-and-down movement of the upper and lower drive mechanism. |
