| 摘要 |
The process for sealing between two elements (100, 102), comprises preparing a first sealing material (104) on a first face of the elements, preparing a second sealing material different from the first sealing material on a second face of the elements, and joining the two elements by heat compressing the sealing material against each other at temperature Tc less than melting temperature of the first and second sealing materials. The first and second sealing materials are chosen such that each has a phase for reacting with the phase of the other sealing material. The process for sealing between two elements (100, 102), comprises preparing a first sealing material (104) on a first face of the elements, preparing a second sealing material different from the first sealing material on a second face of the elements, and joining the two elements by heat compressing the sealing material against each other at temperature Tc less than melting temperature of the first and second sealing materials. The first and second sealing materials are chosen such that each has a phase for reacting with the phase of the other sealing material by interdiffusion of the components of sealing material phases during the joining step. In the step of joining, the phases of sealing materials react together by forming another solid phase of which the melting temperature is greater than Tc of less than 300[deg] C. The first and/or second sealing material is a eutectic alloy. The step of joining is performed in vacuum at a temperature of greater than 200[deg] C, and/or comprises a compression of the first sealing material against the second sealing material to a pressure of greater than 10 6>Pa. The thickness of the first and/or second sealing materials is 100 nm to 50 mu m. The first sealing material has hardness different from the hardness of the second sealing material. Each element comprises a substrate. The sealing materials are prepared on the elements as layers or cords. |
