发明名称 薄膜パターン形成方法及び有機EL表示装置の製造方法
摘要 In this method for manufacturing an organic EL display device, an organic EL display device is manufactured by forming organic EL layers (3R-3B) of corresponding colors on anode electrodes (2R-2B) on a TFT substrate (1). The method includes: a step wherein a resin mask member (4) is adhered, said mask member covering over the TFT substrate (1) and transmitting visible light; a step wherein a laser beam (L) is applied to an anode electrode (2R) that corresponds to red, said anode electrode being on the TFT substrate (1), an opening (5) having a shape that corresponds to a pixel is provided in the mask member (4) on the anode electrode (2R), and a mask (6) is formed; a step wherein, through the opening (5) in the mask (6), a red color organic EL layer (3R) is film-formed on the anode electrode (2R) that corresponds to red, said anode electrode being on the TFT substrate (1); and a step wherein the mask (6) is peeled. Consequently, a highly fine thin film pattern can be easily formed.
申请公布号 JP5895382(B2) 申请公布日期 2016.03.30
申请号 JP20110152018 申请日期 2011.07.08
申请人 株式会社ブイ・テクノロジー 发明人 工藤 修二;水村 通伸;梶山 康一;ハニー マハール アジズ
分类号 H05B33/10;G09F9/30;H01L27/32;H01L51/50 主分类号 H05B33/10
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