| 摘要 |
The invention relates to a cleaning liquid and a cleaning method. The inventions aims to provide a cleaning liquid capable of cleaning a to-be-cleaned item adhered with cerium oxide in a method of dissolving cerium oxide in a form of cerium ion and a cleaning method adopting the cleaning liquid. The cleaning liquid is characterized in that the cleaning liquid can remove the cerium oxide left on the surface of the to-be-cleaned item. The cleaning liquid includes (1)hydrogen fluoride and (2)ammonium salt. The ammonium salt is at least the one selected from ammonium chloride, ammonium nitrate, ammonium sulfate, tetramethyl ammonium chloride, tetramethyl ammonium nitrate and tetramethyl ammonium sulfate. |
