发明名称 METAL SEMICONDUCTOR FIELD EFFECT TRANSISTORS (MESFETS) HAVING CHANNELS OF VARYING THICKNESSES AND RELATED METHODS
摘要 A unit cell of a metal-semiconductor field-effect transistor (MESFET) is provided. The unit cell includes a MESFET having a source, a drain and a gate. The gate is between the source and the drain and on a channel layer of the MESFET. The channel layer has a first thickness on a source side of the channel layer and a second thickness, thicker than the first thickness, on a drain side of the channel layer. Related methods of fabricating MESFETs are also provided herein.
申请公布号 EP1958264(B1) 申请公布日期 2016.03.30
申请号 EP20060837532 申请日期 2006.11.14
申请人 CREE, INC. 发明人 SRIRAM, SAPTHARISHI
分类号 H01L29/812;H01L29/10 主分类号 H01L29/812
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