发明名称 物理量検出デバイス、物理量検出器、および電子機器
摘要 A physical quantity detection device includes: a base portion; a movable portion supported by the base portion via a joint and shifting in accordance with a change of a physical quantity; a physical quantity detection element extending over the base portion and the movable portion; a first support member extending from the base portion and having a first fixing portion; and a second support member extending from the base portion and having a second fixing portion. The distance between the first fixing portion and the second fixing portion is shorter than the distance between the root of the first support member at the junction with the base portion and the root of the second support member at the junction with the base portion.
申请公布号 JP5896114(B2) 申请公布日期 2016.03.30
申请号 JP20110239119 申请日期 2011.10.31
申请人 セイコーエプソン株式会社 发明人 渡辺 潤;中仙道 和之
分类号 G01P15/10;H01L41/08;H01L41/09;H01L41/18;H01L41/187 主分类号 G01P15/10
代理机构 代理人
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