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发明名称
基板処理装置、基板処理システム、半導体装置の製造方法及び基板移載方法
摘要
申请公布号
JP5897531(B2)
申请公布日期
2016.03.30
申请号
JP20130221169
申请日期
2013.10.24
申请人
株式会社日立国際電気
发明人
守田 修
分类号
H01L21/677
主分类号
H01L21/677
代理机构
代理人
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地址
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