A method for manufacturing microelectromechanical flexural resonators with a deforming element that has an elongate body extending along a spring axis. A deforming element is positioned on the semiconductor wafer with a defined nominal n-type doping concentration such that a crystal orientation angle is formed between the spring axis of the deforming element and a crystal axis of the silicon semiconductor wafer. The combination of the crystal orientation angle and the nominal n-type doping concentration is adjusted to a specific range, based on total frequency error of the deforming element in a broad temperature range. The combination is optimized to a range where also sensitivity to variations in the material properties is minimized.
申请公布号
EP3000176(A1)
申请公布日期
2016.03.30
申请号
EP20140728338
申请日期
2014.05.16
申请人
MURATA MANUFACTURING CO., LTD.
发明人
IIHOLA, ANTTI;KAAJAKARI, VILLE;KEMPPAINEN, JARMO;KIVINEN, PASI;MOURUJÄRVI, RISTO;RINKIÖ, MARCUS