METHOD AND APPARATUS OF ELECTRICAL PROPERTY MEASUREMENT USING AN AFM OPERATING IN PEAK FORCE TAPPING MODE

摘要

An apparatus and method of collecting topography, mechanical property data and electrica] property data with an atomic force microscope (AFM) in either a single pass Or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical propertymeasurement.