| 主权项 |
1. A shape measuring apparatus comprising:
a probe having a stylus tip at the tip; a mover that moves the stylus tip on a surface of a workpiece to be measured; an information acquirer, implemented by a processor, that acquires design information of the workpiece; a path setter, implemented by a processor, that sets a path along which the stylus tip is moved, based on the design information; a path component calculator, implemented by a processor, that calculates a path velocity vector which is a velocity component vector of the probe along the path; a push direction component calculator, implemented by a processor, that detects a deflection of the probe toward the workpiece, and calculates a push correction vector which is a velocity component vector to be used for correcting the deflection to a prescribed reference deflection; a locus correction component calculator, implemented by a processor, that detects an amount and a direction of locus deviation of the probe from the path, and calculates a locus correction vector which is a velocity component vector to be used for returning the probe position to the path based on a current position of the probe and the path; a velocity synthesizer, implemented by a processor, that calculates a velocity synthesis vector by combining the path velocity vector, the push correction vector, and the locus correction vector; and a drive controller, implemented by a processor, that moves the probe according to the velocity synthesis vector, wherein the push direction component calculator calculates the push correction vector using a normal direction of the workpiece at a position where the stylus tip is in contact with the surface of the workpiece as a push direction. |
