发明名称 |
Process for controlling the period characterizing the morphology obtained from a blend of block copolymers and of co(polymers) of one of the blocks |
摘要 |
The present invention relates to a process for controlling the period characterizing the morphology obtained from a blend of block copolymers and of (co)polymers of one of the blocks on a surface employing a particular way of carrying out the synthesis of the blend of block copolymers and of (co)polymers of one of the blocks. |
申请公布号 |
US9296014(B2) |
申请公布日期 |
2016.03.29 |
申请号 |
US201414340075 |
申请日期 |
2014.07.24 |
申请人 |
Arkema France |
发明人 |
Navarro Christophe;Chevalier Xavier;Nicolet Celia |
分类号 |
G03F7/00;B05D3/04;G03F1/68;B05D3/02;C08F2/00;C08F297/02;C09D153/00 |
主分类号 |
G03F7/00 |
代理机构 |
RatnerPrestia |
代理人 |
RatnerPrestia |
主权项 |
1. A process for controlling the period characterizing the morphology obtained starting from a blend of block copolymers and of (co)polymers of one of the blocks in thin films, comprising the following stages:
a) synthesizing a block copolymer so that the product of the synthesis comprises the said block copolymer and a (co)polymer of one of the blocks; b) depositing a solution of the blend of the block copolymer and of the (co)polymer on a surface; c) evaporating the solvent; and d) annealing;additionally comprising a purification stage targeted at reducing the amount of (co)polymer. |
地址 |
Colombes FR |