发明名称 Process for controlling the period characterizing the morphology obtained from a blend of block copolymers and of co(polymers) of one of the blocks
摘要 The present invention relates to a process for controlling the period characterizing the morphology obtained from a blend of block copolymers and of (co)polymers of one of the blocks on a surface employing a particular way of carrying out the synthesis of the blend of block copolymers and of (co)polymers of one of the blocks.
申请公布号 US9296014(B2) 申请公布日期 2016.03.29
申请号 US201414340075 申请日期 2014.07.24
申请人 Arkema France 发明人 Navarro Christophe;Chevalier Xavier;Nicolet Celia
分类号 G03F7/00;B05D3/04;G03F1/68;B05D3/02;C08F2/00;C08F297/02;C09D153/00 主分类号 G03F7/00
代理机构 RatnerPrestia 代理人 RatnerPrestia
主权项 1. A process for controlling the period characterizing the morphology obtained starting from a blend of block copolymers and of (co)polymers of one of the blocks in thin films, comprising the following stages: a) synthesizing a block copolymer so that the product of the synthesis comprises the said block copolymer and a (co)polymer of one of the blocks; b) depositing a solution of the blend of the block copolymer and of the (co)polymer on a surface; c) evaporating the solvent; and d) annealing;additionally comprising a purification stage targeted at reducing the amount of (co)polymer.
地址 Colombes FR
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