Semiconductor assembly and method of manufacturing the same

摘要

A method of making a semiconductor assembly is characterized by the step of attaching a chip-on-interposer subassembly on a base carrier with the chip inserted into a through opening of the base carrier and the interposer laterally extending beyond the through opening. The base carrier provides a platform for the chip-on-interposer subassembly attachment, whereas the interposer provides primary fan-out routing for the chip. In the method, a buildup circuitry is electrically coupled to the interposer and an optional cover sheet or additional buildup circuitry can be provided on the chip.

主权项

1. A method of making a semiconductor assembly, comprising the steps of:
providing a semiconductor device; providing an interposer that includes a first surface, a second surface opposite to the first surface, first contact pads on the first surface, second contact pads on the second surface, and through vias that electrically couple the first contact pads and the second contact pads; electrically coupling the semiconductor device to the second contact pads of the interposer by a plurality of bumps to form a chip-on-interposer subassembly; providing a base carrier having a first surface, an opposite second surface, a registration mark on and projecting from the first surface, and a through opening that extends through the base carrier between the first surface and the second surface thereof; attaching the chip-on-interposer subassembly to the base carrier using an adhesive with the semiconductor device inserted into the through opening and the interposer laterally extending beyond the through opening and with the registration mark laterally aligned with and in close proximity to peripheral edges of the interposer and extending beyond the second surface of the interposer; and with the chip-on-interposer subassembly attached to the base carrier, forming a first buildup circuitry on the first surface of the interposer and the first surface of the base carrier, wherein the first buildup circuitry is electrically coupled to the first contact pads of the interposer through first conductive vias of the first buildup circuitry.