Coating film forming apparatus

摘要

A coating film forming apparatus includes: a coating nozzle; a horizontal moving mechanism that relatively moves a substrate and the coating nozzle; a pressure regulating mechanism that regulates a pressure inside the coating nozzle; and a controller that changes an amount of the coating solution to be supplied from the coating nozzle, wherein the coating nozzle includes: a discharge port that is formed long in a direction perpendicular to a direction of the relative movement with respect to the substrate; and a storage chamber that communicates with the discharge port and stores the coating solution therein, and wherein while the coating solution is applied to the substrate, the pressure regulating mechanism is controlled according to a change in width of the substrate, to regulate the pressure inside the storage chamber to thereby change a discharge amount per unit time of the coating solution to be discharged.

主权项

1. A coating film forming apparatus for forming a coating film on a substrate, comprising:
a coating nozzle that supplies a coating solution toward the substrate; a horizontal moving mechanism unit that relatively moves the substrate and the coating nozzle in a horizontal direction; a pressure regulating mechanism unit that regulates a pressure inside the coating nozzle; and a control unit that performs control to change an amount of the coating solution to be supplied from the coating nozzle toward the substrate, wherein the substrate forms a shape changing in width in a direction perpendicular to a direction of the relative movement, wherein the coating nozzle comprises:
a discharge port that is formed long in a direction perpendicular to the direction of the relative movement with respect to the substrate and discharges the coating solution toward the substrate; anda storage chamber that communicates with the discharge port and stores the coating solution therein, wherein the pressure regulating mechanism unit regulates a pressure of a space inside the storage chamber, and wherein the control unit controls, while the coating solution is applied to the substrate, the pressure regulating mechanism unit, according to a discharge width of the coating solution to be discharged from the discharge port changing responding to a change in width of the substrate, to regulate the pressure inside the storage chamber to thereby change a discharge amount per unit time of the coating solution to be discharged from the discharge port, further comprising: a position detection means that detects relative positions of the coating nozzle and the substrate, wherein the control unit comprises:
a substrate shape information storage unit that stores shape information on the substrate;an arithmetic processing unit that calculates the discharge width and the discharge amount of the coating solution on a basis of the shape information on the substrate stored in the substrate shape information storage unit and information on the relative position of the substrate detected by the position detection means; anda pressure control unit that controls the pressure regulating mechanism unit on a basis of the discharge width and the discharge amount of the coating solution calculated by the arithmetic processing unit.