LINE LIGHT SOURCE APPARATUS, AND DEFECT INSPECTION APPARATUS INCLUDING THE SAME

摘要

Provided are a line light source apparatus, and a defect inspection apparatus comprising the same. According to the present invention, the line light source apparatus comprises: a plurality of light devices arranged in a first distance in a first direction; lens a first light slit, a second light slit, and a cylindrical light concentration arranged in a second direction perpendicular to the first direction; a cylindrical lens arranged between the first light slit and the second light slit; and a light distribution sheet arranged between the cylindrical lens and the second light slit. The line light source apparatus and the defect inspection apparatus comprising the same generates linear light having uniformity; thereby performing rapid defect inspection for a large area substrate.