BEAM POSITION MEASURING METHOD FOR MULTI-CHARGED PARTICLE BEAM AND MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS

摘要

According to one embodiment of the present invention, a beam position measuring method of a multi-charged particle beam: obtains the number of beams required when measurement reproducibility of a current amount in a multi-charged particle beam is within an allowable value; sets a plurality of measure points in accordance with a desired dimension accuracy value in a radiation region in which all of the multi-charged particle beam is radiated; sets a beam region including the measure point by this numbers of the beams among the multi-charged particles in each of the measure points; and measures a position of the corresponding measure point by using the beams of the corresponding beam region in each measure point.