Classification of surface features using fluorescence

摘要

Provided herein is an apparatus, including a photon emitter configured to emit photons onto a surface of an article, a photon detector array configured to receive photons from surface features of the article; and a processing means configured for processing photon-detector-array signals corresponding to photons scattered from the surface features and photons fluoresced from the surface features, wherein the processing means is further configured for classifying the surface features of the article.

主权项

1. An apparatus, comprising:
a photon emitter configured to emit photons onto a surface of an article in a photon pulse; a photon detector array coupled to a telecentric lens, configured to receive both scattered photons and fluoresced photons from surface features of the article, wherein the telecentric lens is a double telecentric lens; and a processing means configured for
processing photon-detector-array signals corresponding to the scattered photons and the fluoresced photons received by the photon detector array during the photon pulse and subsequent to the photon pulse, respectively, andclassifying the surface features from the photon-detector-array signals corresponding to the scattered photons and the fluoresced photons.