Methods of manufacturing high electron mobility transistors

摘要

The methods may include forming a first material layer on a substrate, increasing electric resistance of the first material layer, and forming a source pattern and a drain pattern, which are spaced apart from each other, on the first material layer, a band gap of the source and drain patterns greater than a band gap of a first material layer.

主权项

1. A method of manufacturing a high electron mobility transistor (HEMT), comprising:
forming a first layer including a first material on a substrate; after the first layer is completely formed, increasing an electrical resistance of at least a part of the first layer; after the electrical resistance of at least a part of the first layer is increased, forming a source pattern and a drain pattern spaced apart from each other on the first layer, the source and drain patterns including a second material, a band gap of the second material greater than a band gap of the first material; forming a gate insulation layer on the first layer between the source pattern and the drain pattern; forming a gate electrode on the gate insulation layer; forming a source electrode on the source pattern; and forming a drain electrode on the drain pattern, wherein the forming of the source pattern and the drain pattern includes forming a growth blocking layer on a channel region and a peripheral region of the first layer such that regions of the first layer corresponding to the source and drain patterns are exposed, depositing the second material onto the exposed regions of the first layer, and removing the growth blocking layer.