| 发明名称 | Resonator anchors and related apparatus and methods | ||
| 摘要 | Micromechanical resonators having stub anchors are described. The micromechanical resonators may be suspended, being connected to a substrate or support by one or more anchors. The anchor(s) may include one or more stubs which can impact the acoustic impedance of the anchor(s). The stub(s) may have various shapes and sizes. In some instances, multiple resonators may be coupled together by a connector having one or more stubs. | ||
| 申请公布号 | US9299910(B1) | 申请公布日期 | 2016.03.29 |
| 申请号 | US201313896183 | 申请日期 | 2013.05.16 |
| 申请人 | Analog Devices, Inc. | 发明人 | Sparks Andrew;Thalmayr Florian;Kuypers Jan H. |
| 分类号 | H01L41/053 | 主分类号 | H01L41/053 |
| 代理机构 | Wolf, Greenfield & Sacks, P.C. | 代理人 | Wolf, Greenfield & Sacks, P.C. |
| 主权项 | 1. An apparatus, comprising: a support frame; a rectangular mechanical resonating structure suspended above a cavity in the support frame, the suspended mechanical resonating structure having first and second sides; a first anchor mechanically connecting the mechanical resonating structure to the support frame and contacting the first side of the mechanical resonating structure; and a second anchor mechanically connecting the mechanical resonating structure to the support frame and contacting the second side of the mechanical resonating structure, wherein each of the first anchor and the second anchor includes a stub representing an extension having a free end or a closed contour off-center from a segment of the anchor from which it extends. | ||
| 地址 | Norwood MA US | ||