| 发明名称 |
Apparatuses and methods including magnetic layer oxidation |
| 摘要 |
Provided herein is a method including oxidizing tops of features of a patterned magnetic layer to form oxidized tops of the features; removing an excess of an applied first protective material down to at least the oxidized tops of the features to form a planarized layer; and applying a second protective material over the planarized layer. |
| 申请公布号 |
US9299380(B2) |
申请公布日期 |
2016.03.29 |
| 申请号 |
US201314062776 |
申请日期 |
2013.10.24 |
| 申请人 |
Seagate Technology LLC |
发明人 |
Feldbaum Michael R.;Wago Koichi;Lu Bin;Kuo David S. |
| 分类号 |
B44C1/22;G11B5/74;G11B5/855;H01F41/34;H01F10/12 |
主分类号 |
B44C1/22 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method, comprising
patterning features into a layer of magnetic material to form a patterned magnetic layer,
wherein the features correspond to individual bits for perpendicular magnetic recording; oxidizing tops and sidewalls of the features to form oxidized tops and sidewalls of the features; applying a first protective material over the features; removing an excess of the first protective material down to at least the oxidized tops of the features to form a planarized layer; depositing a coupled granular/continuous layer over the planarized layer; and applying a second protective material over the coupled granular/continuous layer. |
| 地址 |
Cupertino CA US |
