Method for fabricating a transistor device with a tuned dopant profile

摘要

A transistor device with a tuned dopant profile is fabricated by implanting one or more dopant migrating mitigating material such as carbon. The process conditions for the carbon implant are selected to achieve a desired peak location and height of the dopant profile for each dopant implant, such as boron. Different transistor devices with similar boron implants may be fabricated with different peak locations and heights for their respective dopant profiles by tailoring the carbon implant energy to effect tuned dopant profiles for the boron.

主权项

1. A method for fabricating a transistor device having a gate, a channel, a source and a drain on either side of the channel, the channel having a tuned dopant profile, comprising:
defining an implant region; performing a first implantation of a first dopant migration mitigating material into the implant region at a first preselected dopant migration mitigating energy and dose; implanting a screening layer into the implant region at a preselected screening layer energy and screening layer dose, the screening layer defining a depletion width for the transistor channel when a voltage is applied to the gate; implanting a threshold voltage set layer into the implant region at a preselected threshold voltage set layer energy and threshold voltage set layer dose; wherein the first preselected dopant migration mitigating energy effects the placement of a peak of a dopant profile of the screening layer at a first location and a first thickness; wherein the preselected threshold voltage set layer energy and threshold voltage set layer dose effects the placement of the peak of a dopant profile of the threshold voltage layer to be different from the first location; wherein the threshold voltage set layer is coextensive with the screening layer and abuts the source and drain and the screening layer extends laterally across the channel.