Electronic device manufacturing apparatus

摘要

The electronic device manufacturing apparatus is provided with: a substrate holding member; a first supply source which is provided so as to move relative to the primary surface side of the substrate, and which forms a nitrogen-containing layer by supplying a nitrogen-containing compound towards the primary surface of the substrate; and a second supply source which is disposed downstream of the first supply source in the direction of movement relative to the substrate, which forms a transparent electrode layer by supplying towards the primary surface of the substrate an electrode material having silver as the main component thereof, and which is disposed such that, between starting formation and two minutes after finishing formation of the nitrogen-containing layer at a prescribed position on the substrate, formation of the transparent electrode layer is started at said prescribed position on the substrate.

主权项

1. An electronic device manufacturing apparatus, comprising:
a holding member holding a substrate having a primary surface on which an electronic device is to be formed; a first supply source provided on a primary surface side of the substrate held by the holding member and configured to include an evaporation film formation heating boat and form a nitrogen-containing layer on the primary surface of the substrate held by the holding member by heating a nitrogen-containing compound contained in the heating boat so as to be gasified and ejecting the gasified nitrogen-containing compound toward the primary surface of the substrate so as to be deposited thereon; and a second supply source provided on the primary surface side of the substrate held by the holding member and configured to include an evaporation film formation heating boat and form a transparent electrode layer on the primary surface side of the substrate by heating an electrode material mainly containing silver contained in the heating boat so as to be gasified and ejecting the gasified electrode material toward the primary surface of the substrate, wherein the substrate held by the holding member and each of the first supply source and the second supply source are configured to be relatively moved, the second supply source is provided on a downstream side of the first supply source in a relative movement direction of the substrate held by the holding member, and spacing between the first supply source and the second supply source is set so that formation of a transparent electrode layer at a prescribed position on the substrate is started after starting formation of a nitrogen-containing layer at the prescribed position on the substrate and before an elapse of two minutes after finishing the formation of the nitrogen-containing layer at the prescribed position, such that the transparent electrode layer having a relatively higher continuity is formed at the predetermined position on the primary surface of the substrate via the nitrogen-containing layer.