Device for detecting evaporation source and method for applying the same

摘要

The present disclosure relates to a process for manufacturing Organic Light-Emitting Diode (OLED) display panel, and in particular to a device and a method for detecting evaporation source. Through installing a mobile detector above a linear evaporation source, the vapor-deposition rate of the whole linear can be timely and effectively detected. The feedback of uniformity of vapor-deposition can be effectively given, and at the same time the abnormity of the vapor-deposition can be found. Meanwhile, in order to increase the yield and quality of product as well as prevent the evaporation source pollution caused by the dropping of some defects such as organic material or dust, the mobile detector is locked in one side of the evaporation source when it does not work.

主权项

1. A device for detecting evaporation source, comprising:
a guide rail device installed on a vapor-deposition equipment, the vapor-deposition equipment having a linear evaporation source; and a detector movably installed at a preconfigured distance from the linear evaporation source via the guide rail device, for entirely detecting vapor-deposition rate of the evaporation source; wherein, the detector moves along longitudinal direction of the linear evaporation source by the guide rail device; wherein, the guide rail device comprises a standby guide rail, a detecting guide rail, and a deflector: the detector reciprocates along the longitudinal direction of the linear evaporation source for entirely detecting the linear evaporation source by the detecting guide rail; through the standby guide rail, the detector stops at a side close to the linear evaporation source: the detector is switched between the standby guide rail and the detecting guide rail, meanwhile, during the switch between the standby guide rail and the detecting guide rail, the moving direction of the detector is the vertical direction of the linear evaporation source by the deflector.