发明名称 Electromagnetic wave detector with improved wavelength selection property
摘要 In order to improve efficiency for converting electromagnetic energy into heat energy, an electromagnetic wave detector detecting an electromagnetic wave having a specific wavelength includes a substrate in which a read-out circuit is formed; a temperature detecting portion with a space from the substrate and which includes a bolometer thin film and a first antenna wire; a supporting portion which supports the temperature detecting portion with a space from the substrate and which includes electrode wires connected to the read-out circuit and to the bolometer thin film; and a reflecting portion which is provided to the substrate and which reflects the electromagnetic wave penetrating the temperature detecting portion toward the temperature detecting portion.
申请公布号 US9297701(B2) 申请公布日期 2016.03.29
申请号 US201414224896 申请日期 2014.03.25
申请人 NEC Corporation 发明人 Sasaki Tokuhito
分类号 G01J5/20;G01J5/02;G01J5/08;G01J5/22 主分类号 G01J5/20
代理机构 Finnegan, Henderson, Farabow, Garrett & Dunner LLP 代理人 Finnegan, Henderson, Farabow, Garrett & Dunner LLP
主权项 1. An electromagnetic wave detector configured to detect an electromagnetic wave having a specific wavelength, comprising: a substrate in which a read-out circuit is formed; a temperature detecting portion a space from the substrate, the temperature detecting portion including a bolometer thin film and a first antenna wire; a supporting portion configured to support the temperature detecting portion and including at least one electrode wire electrically connected to the read-out circuit and the bolometer thin film; and a reflecting portion between the substrate and the temperature detecting portion, and configured to reflect the electromagnetic wave penetrating the temperature detecting portion toward the temperature detecting portion.
地址 Tokyo JP