发明名称 |
Electromagnetic wave detector with improved wavelength selection property |
摘要 |
In order to improve efficiency for converting electromagnetic energy into heat energy, an electromagnetic wave detector detecting an electromagnetic wave having a specific wavelength includes a substrate in which a read-out circuit is formed; a temperature detecting portion with a space from the substrate and which includes a bolometer thin film and a first antenna wire; a supporting portion which supports the temperature detecting portion with a space from the substrate and which includes electrode wires connected to the read-out circuit and to the bolometer thin film; and a reflecting portion which is provided to the substrate and which reflects the electromagnetic wave penetrating the temperature detecting portion toward the temperature detecting portion. |
申请公布号 |
US9297701(B2) |
申请公布日期 |
2016.03.29 |
申请号 |
US201414224896 |
申请日期 |
2014.03.25 |
申请人 |
NEC Corporation |
发明人 |
Sasaki Tokuhito |
分类号 |
G01J5/20;G01J5/02;G01J5/08;G01J5/22 |
主分类号 |
G01J5/20 |
代理机构 |
Finnegan, Henderson, Farabow, Garrett & Dunner LLP |
代理人 |
Finnegan, Henderson, Farabow, Garrett & Dunner LLP |
主权项 |
1. An electromagnetic wave detector configured to detect an electromagnetic wave having a specific wavelength, comprising:
a substrate in which a read-out circuit is formed; a temperature detecting portion a space from the substrate, the temperature detecting portion including a bolometer thin film and a first antenna wire; a supporting portion configured to support the temperature detecting portion and including at least one electrode wire electrically connected to the read-out circuit and the bolometer thin film; and a reflecting portion between the substrate and the temperature detecting portion, and configured to reflect the electromagnetic wave penetrating the temperature detecting portion toward the temperature detecting portion. |
地址 |
Tokyo JP |