SEMICONDUCTOR DEVICE FOR TESTING A LARGE NUMBER OF DEVICES AND COMPOSING METHOD AND TEST METHOD THEREOF

摘要

According to an embodiment of the present invention, a method for testing a plurality of transistors of a semiconductor device comprises the following steps of: forming a plurality of elements or a plurality of logic cells in a semiconductor device by using a front end of line (FEOL) process; configuring a selection logic for selecting any one of a plurality of transistors by connecting the plurality of elements or the plurality of logic cells; connecting the selection logic and the plurality of transistors and forming a pad for connecting an input terminal of the selection logic and drain or source terminals of the plurality of transistors; and sequentially selecting the plurality of transistors by using the selection logic and measuring an electrical characteristic of one selected transistor through the pad.