发明名称 Radial waveguide systems and methods for post-match control of microwaves
摘要 A system provides post-match control of microwaves in a radial waveguide. The system includes the radial waveguide, and a signal generator that provides first and second microwave signals that have a common frequency. The signal generator adjusts a phase offset between the first and second signals in response to a correction signal. The system also includes first and second electronics sets, each of which amplifies a respective one of the first and second microwave signals. The system transmits the amplified, first and second microwave signals into the radial waveguide, and matches an impedance of the amplified microwave signals to an impedance presented by the waveguide. The system also includes at least two monitoring antennas disposed within the waveguide. A signal controller receives analog signals from the monitoring antennas, determines the digital correction signal based at least on the analog signals, and transmits the correction signal to the signal generator.
申请公布号 US9299537(B2) 申请公布日期 2016.03.29
申请号 US201414221132 申请日期 2014.03.20
申请人 Applied Materials, Inc. 发明人 Kobayashi Satoru;Park Soonam;Lubomirsky Dmitry;Sugai Hideo
分类号 H01J7/24;H01J37/32;H01J37/244 主分类号 H01J7/24
代理机构 Kilpatrick Townsend & Stockton LLP 代理人 Kilpatrick Townsend & Stockton LLP
主权项 1. A system that provides post-match control of microwaves in a radial waveguide, comprising: the radial waveguide; a signal generator that provides a first microwave signal and a second microwave signal, the first and second microwave signals having a common frequency, wherein the signal generator adjusts a phase offset between the first and second microwave signals in response to a digital correction signal; a first electronics set and a second electronics set, wherein each of the first and second electronics sets: amplifies a respective one of the first and second microwave signals to provide a respective first or second amplified microwave signal,transmits the respective one of the first and second amplified microwave signals into the radial waveguide; andmatches an impedance of the respective one of the first and second amplified microwave signals to an impedance presented by the radial waveguide; at least two monitoring antennas disposed at least 30 degrees about a circumference of the radial waveguide from locations at which the first and second electronics sets transmit the respective first and second amplified microwave signals into the radial waveguide; and a signal controller that: receives analog signals from the at least two monitoring antennas;determines the digital correction signal based at least on the analog signals from the at least two monitoring antennas; andtransmits the digital correction signal to the signal generator.
地址 Santa Clara CA US