Nozzle device with a plurality of piezoelectric plate module

摘要

A nozzle device includes an upper cover module having a cavity, a plurality of stacked piezoelectric plate modules, a plug module, and a lower cover module. Each piezoelectric plate module includes a substrate, a piezoelectric material, an electrical connection, an upper electrode, and a lower electrode. The substrate includes multiple first through holes disposed correspondingly to the cavity. The piezoelectric material is located on the upper surface of the substrate. The electrical connection extends from the lower surface of the substrate, through the substrate, and to the bottom of the piezoelectric material. The lower electrode is located below the lower surface of the substrate and electrically connects to the electrical connection. The plug module includes plugs and second through holes corresponding to the first through holes. The lower cover module includes openings disposed according to the plugs of the plug module.

主权项

1. A nozzle device comprising:
an upper cover module defining a cavity configured to contain fluid; a plurality of piezoelectric plate modules each comprising:
two electrodes; anda piezoelectric substrate comprising a first portion between the two electrodes, a second portion thinner than the first portion, and a first through hole located at the second portion and disposed correspondingly to the cavity; a plug module comprising a plug protruding downward and a second through hole corresponding to the first through hole; and a lower cover module comprising an opening disposed correspondingly to the plug of the plug module; wherein the plurality of piezoelectric plate modules are located between the upper cover module and the plug module, and the plug module is located between the plurality of piezoelectric plate modules and the lower cover module.