IONZIER DEVICE AND METHOD FOR CUTTING SUBSTRATE USING THE SAME

摘要

In the present invention, disclosed are an ionizer and a method for cutting a substrate using the same. The ionizer of the present invention comprises: a stage placing a substrate, and having a through-hole formed therein; and an ionizer module of which a part is inserted into the through-hole, and is installed to ascend or descend the substrate by ascending or descending. The ionizer module removes static electricity between the substrate and the stage by spraying ionized gas when the substrate ascends.