MAGNET PLATE ASSEMBLY, AND APPARATUS FOR DEPOSITION COMPRISING THE SAME AND THE METHOD OF DEPOSITING USING THE SAME

摘要

According to an embodiment of the present invention, disclosed is a magnet plate assembly comprising: a magnetic body having specific magnetic force; a magnet supporter including a first protrusion unit to support the magnetic body; a guiding unit supporting the magnet supporter and comprising a first opening which penetrates the first protrusion unit; a first frame formed to be extended in a first direction, which is the width direction of the magnet supporter, to accommodate the first protrusion unit; a first mother block closely arranged to be adjacent to one end of the guiding unit to touch the same in order to move the guiding unit in a second direction intersecting with the first direction; and a second mother block arranged to be adjacent to the other end of the guiding unit to touch the same in order to move or fix the guiding unit. The first protrusion unit is formed to be able to slide in the first direction regarding the first frame. Embodiments of the present invention provide the magnet plate assembly, a deposition device comprising the same, and a deposition method thereof.