PERFECTED PROCEDURE OF COMBINED SPRAYING OF ALLOYS AND COMPOUNDS WITH APPLICATION OF DUAL C-MAG CATHODE STRUCTURE AND APPROPRIATE UNIT

摘要

FIELD: metallurgy.SUBSTANCE: claimed process comprises the fabrication of the first and second revolving cylindrical spray targets. Note here that the first spray target includes the first spray material. The second spray target comprises the second spray material. Said two targets are sprayed. At least one magnetic core of the second spray target is directed so that its spray material is sprayed onto the first target. The first spray material of the first target and the second spray material sprayed onto the first target from the second target is sprayed onto the substrate to form the film. The first target plasma erosion zone is oriented in the first direction perpendicular to the substrate. Said zone of the second target is oriented in the second direction to the first target at 70-170 degrees to the first direction. The first magnetic field intensity is used for the first target. The second magnetic first intensity, higher than the first one, is used for the second target.EFFECT: plies of improved or more homogeneous mix of various components.18 cl, 2 dwg