LASER PROCESSING APPARATUS AND PULSE LASER BEAM OUTPUT METHOD

摘要

Provided is a laser processing machine capable of changing pulse energy by controlling laser power of each laser pulse. A laser power supply applies high frequency voltage to a discharge electrode of a laser oscillator in accordance with a duty cycle of an inputted excitation command signal. An excitation pattern command signal including duty cycle information is inputted into a laser controller. The laser controller assigns the excitation command signal to the laser power supply based on the duty cycle information included in the excitation pattern command signal. A laser processing machine controller assigns a pulse output timing signal commanding the timing of an output of a pulse laser beam and the excitation pattern command signal to the laser controller. A stage holds an object to be processed. An optical system guides the pulse laser beam outputted from the laser oscillator to the object held on the stage.