PLASMONIC DEVICE WITH PHOTONIC CRYSTAL AND METHOD FOR MANUFACTURING THE SAME

摘要

According to an embodiment of the present invention, a light receiving element using a plasmon structure comprises: a semiconductor substrate; a plurality of light receiving parts having a specific pattern protruding from an upper surface of the semiconductor substrate; and a nanostructure which is hung among the plurality of light receiving parts and arranged in contact with the upper surface of the semiconductor substrate and induces a plasmon phenomenon on the upper surface.