| 摘要 |
The present invention relates to a gate valve capable of preventing a substrate, placed on an entrance for closing operation, from being damaged or broken, a gate valve control method, and a flexible substrate processing apparatus including the gate valve. The gate valve comprises: a gate body wherein the entrance for a flexible substrate is formed; a gate transferred from the inner gate body and configured to open and close the entrance; and a gate control unit stopping closing operation of the gate in a starting point when pressure is applied to the flexible substrate, as the gate is closed. As a result, productivity of the substrate can be enhanced as the substrate from being broken or damaged can be prevented during the opening/closing operation of the entrance. |
